Toray releases PFAS-free film reduces contamination boosts semiconductor production

Industries, Inc. has announced the launch of a new mold release film designed for advanced semiconductor applications, marking a significant advancement in the industry. This innovative film is notable for being free of per- and polyfluoroalkyl substances (PFAS), a group of organic fluorine compounds that are increasingly facing regulatory scrutiny in Europe and other regions.

Semiconductors play a critical role in modern life, powering devices such as automobiles, smartphones, PCs, and servers. Recent technological advancements have focused on enhancing semiconductors for future applications like 5G communication, generative AI, automatic driving, and telemedicine. These advancements require improvements in both front-end nano-ultra-fine wafer processes and back-end semiconductor packaging processes.

Semiconductor packaging involves the electric packaging of IC chips to shield them from external elements and establish connections between terminals. In the mold process, a release film placed between mold resins and molds prevents contamination. However, the increasing complexity of mold shapes in advanced semiconductors, along with issues like mold release film breakage and wrinkling, has led to more frequent contamination from mold resins.

To address these challenges, Toray leveraged its NANOALLOY™ technology to develop a mold release film with enhanced gas barrier properties and heat resistance flexibility. This barrier significantly reduces mold stains from certain substances by over 80% compared to conventional films. The film’s heat-resistance flexibility also prevents breakage and wrinkling during the mold forming process.

Traditionally, mold release films have used PFAS materials. Toray’s PFAS-free film represents a more environmentally friendly alternative. After confirming that the film can improve operational rates in semiconductor manufacturing, Toray has established a mass production system and is now offering the film commercially.

Toray remains committed to research and development efforts aimed at creating innovative materials and technologies. This commitment aligns with the company’s corporate philosophy of contributing sustainably to society by creating new value and supporting the realization of a smart social infrastructure.

Glossary:

  • PFAS: A generic term for artificial organic fluorine compounds, including perfluoroalkyl and polyfluoroalkyl compounds and their salts, known for their resistance to degradation. Europe is considering regulations to control environmental releases of PFAS.
  • NANOALLOY™ technology: A microstructure control technology developed by Toray, involving the precise dispersion of multiple polymers on a nanometric scale to enhance material properties significantly.

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